1.

Conference Proceedings
Conference Proceedings
1. Ligation module for in vitro selection in DNA computing
van Noort, D. ; Lee, I.-H. ; Landweber, L. F. ; Zhang, B.-T.
Pub. info.: Biomedical applications of micro- and nanoengineering II : 13-15 December 2004, Sydney, Australia.  pp.28-34,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5651
2.

Conference Proceedings
Conference Proceedings
2. 90nm technology contact CD performance characterization via ODP scatterometry
Jeon, B.-T. ; Kim, O.-H. ; Baik, J.-H. ; Ha, J.-H. ; Lee, I.-H. ; Yang, W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.140-143,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
3.

Conference Proceedings
Conference Proceedings
3. Belly button reduction using optimized resist filtration method in CMOS gate pattern process
Baik, J.-H. ; Lee, D.-J. ; Lee, S.-H. ; Park, S.-H. ; Lee, I.-H. ; Choi, J.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.753-760,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Resist cracking and adhesion improvement
Lee, I.-H. ; Lee, J.-S. ; Lee, K.-Y. ; Park, C.-G. ; Choi, J.-S. ; Lee, J.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1444-1452,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039