Katz, A. ; Wang, K.-W. ; Baiocchi, F. A. ; Dautremont-Smith, W. C. ; Lane, E. ; Lee, C.-H ; Wong, Y-M. ; Tai, K.L. ; Bacon, D.. D. ; Liftman, H. S. ; Varman., R. R.
Pub. info.:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.889-904, 1992. Pittsburgh, Pa.. Materials Research Society
Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems. pp.37-45, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering