1.

Conference Proceedings
Conference Proceedings
1. 1 Intra-die temperature non-uniformity related to front side emissivity dependence during Rapid Thermal Annealing
Laviron, C. ; Lindsay, R. ; Michaliet, A. ; Halimaoui, A. ; Granneman, E.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.3-10,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings
Conference Proceedings
2. 19 Ultra-shallow junction formation by Gas Immersion Laser Doping (GILD) on silicon bulk and SOI substrate
Hernandez, M. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Kerrien, G. ; Laviron, C. ; Semeria, M N.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.145-154,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
3.

Conference Proceedings
Conference Proceedings
3. 17 Laser thermal processing for ultra-shallow junction formation: experiment and modelling
Venturini, J. ; Hernandez, M ; Sarnet, T. ; Kerrien, G. ; Laviron, C. ; Santailler, J.L. ; Boulmer, J.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.131-136,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
4.

Conference Proceedings
Conference Proceedings
4. Investigation of Fluorine Effect on the Boron Diffusion by Mean of Boron Redistribution in Shallow Delta-Doped Layers
Halimaoui, A. ; Hartmann, J.M. ; Laviron, C. ; El-Farhane, R. ; Laugier, F.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.121-128,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
5.

Conference Proceedings
Conference Proceedings
5. Solid Phase Epitaxy Process Integration on 50 nm PMOS Devices : Effects of Defects on Chemical and Electrical Characteristics of Ultra-Shallow Junctions
El-Farhane, R. ; Laviron, C. ; Cristiano, F. ; Cherkashin, N. ; Morin, P. ; Juhel, M. ; Stolk, P. ; Arnaud, F. ; Pouydebasque, A. ; Wacquant, F. ; Lenoble, D. ; Halimaoui, A.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.21-30,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
6.

Conference Proceedings
Conference Proceedings
6. Experiment and Modelization Results on Laser Thermal Processing for Ultra-Shallow Junction Formation: Influence of Laser Pulse Duration
Venturini, J. ; Hernandez, M. ; Zahorski, D. ; Kerrien, G. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Laviron, C. ; Semeria, M. -N. ; Camel, D. ; Santailler, J. -L.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.255-260,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
7.

Conference Proceedings
Conference Proceedings
7. Emissivity Dependence of Spike Annealing in Levitor and Lamp-Based Heating Systems
Granneman, E.H.A. ; Laviron, C. ; Halimnaoui, A. ; Farhane, R.El ; Kuznetsov, V.I. ; Pages, X. ; Grisel, R. ; Terhorst, H.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.281-288,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11
8.

Conference Proceedings
Conference Proceedings
8. Single-Shot Excimer Laser Annealing and In Process Ellipsometry Analysis for Ultra Shallow Junctions
Noguchi, T. ; Kerrien, G. ; Sarnet, T . ; Debarre, D. ; Boulmer, J. ; Zahorski, D. ; Hernandez, M. ; Defranoux, C. ; Laviron, C. ; Semeria, M.-N.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.33-38,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
9.

Conference Proceedings
Conference Proceedings
9. Laser doping for microelectronics and microtechnology
Sarnet, T. ; Kerrien, G. ; Yaakoubi, N. ; Bosseboeuf, A. ; Dufour-Gergam, E. ; Debarre, D. ; Boulmer, J. ; Kakushima, K. ; Laviron, C. ; Hernandez, M. ; Venturini, J. ; Bourouina, T.
Pub. info.: High-Power Laser Ablation V.  pp.669-680,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448