1.

Conference Proceedings
Conference Proceedings
1. Integrating DfM components into a cohesive design-to-silicon solution(Invited Paper)
Liebmann, L. ; Maynard, D. ; McCullen, K. ; Seong, N. ; Buturla, E. ; Lavin, M. ; Hibbeler, J.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.1-12,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. The problem of optimal placement of sub-resolution assist features (SRAF)
Mukherjee, M. ; Mansfield, S. ; Liebmann, L. ; Lvov, A. ; Papadapoulou, E. ; Lavin, M. ; Zhao, Z.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1417-1429,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. Subresolution assist feature implementation for high-performance logic gate-level lithography
Gabor, A.H. ; Bruce, J. ; Chu, W. ; Ferguson, R. ; Fonseca, C.A. ; Gordon, R.L. ; Jantzen, K. ; Khare, M. ; Lavin, M. ; Lee, W.-H. ; Liebmann, L.W. ; Muller, k.P. ; Rankin, J. ; Varekamp, P. ; Zach, F.X.
Pub. info.: Optical Microlithography XV.  Part One  pp.418-425,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691