1.

Conference Proceedings
Conference Proceedings
1. The Control and Impact of Processing Ambient During RTP
Maex, Karen ; Kondoh, Eiichi ; Lauwers, Anne ; DePotter, Muriel ; Prost, Joris
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.239-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth
Lauwers, Anne ; Lindsay, Richard ; Henson, Kirklen ; Severi, Simone ; Akheyar, Amal ; Pawlak, Bartek J. ; Potter, Muriel de ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.43-48,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
3.

Conference Proceedings
Conference Proceedings
3. Applications of Ni-Based Silicides to 45 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Pawlak, Malgorzata A. ; Dal, Mark Van ; Akheyar, Amal ; Potter, Muriel De ; Kottantharayil, Anil ; Pourtois, Geoffrey ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.31-42,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
4.

Conference Proceedings
Conference Proceedings
4. Channel Engineering and Junction Overlap Issues for Ultra-Shallow Junctions Formed by SPER in the 45 nm CMOS Technology Node
Severi, Simone ; Henson, Kirklen ; Lindsay, Richard ; Lauwers, Anne ; Pawlak, Bartek J. ; Surdeanu, Radu ; Meyer, K.De
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.455-462,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
5.

Conference Proceedings
Conference Proceedings
5. Linewidth Dependence Of The Reverse Bias Junction Leakage For Co-Silicided Source/Drain Junctions
Lauwers, Anne ; Potter, Muriel de ; Lindsay, Richard ; Chamirian, Oxana ; Demeurisse, Caroline ; Vrancken, Christa ; Maex, Karen
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.29-34,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
6.

Conference Proceedings
Conference Proceedings
6. Analysis Of Silicide/Diffusion Contact Resistance Making Use Of Transmission Line Structures
Akheyar, Amal ; Lauwers, Anne ; Lindsay, Richard ; Potter, Muriel de ; Tempel, Georg ; Maex, Karen
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.53-58,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
7.

Conference Proceedings
Conference Proceedings
7. Silicides for 65 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Dal, Mark Van ; Akheyar, Amal ; Richard, Olivier ; Lisoni, Judit G. ; Potter, Muriel De ; Lindsay, Richard ; Maex, Karen
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.267-278,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
8.

Conference Proceedings
Conference Proceedings
8. Ni Silicide Morphology On Small Features
Chamirian, Oxana ; Lauwers, Anne ; Kittl, Jorge A. ; Dal, Mark Van ; Potter, Muriel De ; Vrancken, Christa ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.147-152,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
9.

Conference Proceedings
Conference Proceedings
9. Effects of Alloying on Properties of NiSi for CMOS Applications
Dal, Mark van ; Akheyar, Amal ; Kittl, Jorge A. ; Chamirian, Oxana ; Potter, Muriel De ; Demeurisse, Caroline ; Lauwers, Anne ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.153-158,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
10.

Conference Proceedings
Conference Proceedings
10. Electrical Performance and Scalability of Ni-Monosilicide Towards sub 0.13 μm Technologies
Lauwers, Anne ; Potter, Muriel de ; Lindsay, Richard ; Steegen, An ; Roelandts, Nico ; Loosen, Fred ; Vrancken, Christa ; Maex, Karen
Pub. info.: Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2002.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 670