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16 results

Conference Proceedings

1. STRUCTURAL AND ELECTRICAL PROPERTIES OF POLY- SILICON FILMS DEPOSITED AT 5 mbar IN A RTP REACTOR

Semmache, B. ; Kaddour-Krieger, S. ; Lemiti, M. ; Barbier, D. ; Fayeulle, S. ; Laugier, A.

Pub. info.:	Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.311-321, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-10

Conference Proceedings

2. DEFECT STATES INDUCED BY RAPID THERMAL ANNEALING IN VIRGIN OR IMPLANTED CZOCHRALSKY-GROWN SILICON

Remram, M. ; Barbier, D. ; Joly, J.?F. ; Laugier, A.

Pub. info.:	Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.705-710, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	74

Conference Proceedings

3. IMPLANTED IMPURITY INCORPORATION AND SEGREGATION PHENOMENA INDUCED BY PEBA IN SILICON

Chaussemy, G. ; Barbier, D. ; Laugier, A.

Pub. info.:	Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.. pp.257-264, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	35

Conference Proceedings

4. A STUDY OF ELECTRICALLY ACTIVE DEFECTS INDUCED BY PULSED-ELECTRON-BEAM ANNEALING IN (100) N-TYPE VIRGIN SILICON

Doghmane, M. S. ; Barbier, D. ; Laugier, A.

Pub. info.:	Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.. pp.287-292, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	35

Conference Proceedings

5. ARSENIC REDISTRIBUTION AND OUTDIFFUSION IN IMPLANTED CZOCHRALSKI-GROWN P-TYPE SILICON DURING RAPID THERMAL ANNEALING

Chaussemy, G. ; Canut, B. ; Kumar, S. N. ; Barbier, D. ; Laugier, A.

Pub. info.:	Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.695-700, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	100

Conference Proceedings

6. ON THE ORIGIN OF THE NEW ELECTRON TRAPS INDUCED BY RAPID THERMAL ANNEALING IN GaAs USING CAPPING PROXIMITY TECHNIQUE

Marrakchi, G. ; Chaussemy, G. ; Laugier, A. ; Guillot, G.

Pub. info.:	Advances in materials, processing, and devices in III-V compound semiconductors. pp.27-32, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	144

Conference Proceedings

7. ANGLE RESOLVED XPS ANALYSIS OF SURFACE REGION DEFECTS IN RAPID THERMAL ANNEALED ANTIMONY IMPLANTED SILICON

Kumar, S.N. ; Chaussemy, G. ; Laugier, A. ; Canut, B. ; Charbonnier, M.

Pub. info.:	Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.927-930, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	163

Conference Proceedings

8. ARSENIC IMPLANT ACTIVATION AND REDISTRIBUTION IN P-TYPE SILICON INDUCED BY PULSED ELECTRON BEAM ANNEALING

Barbier, D. ; Baghdadi, M. ; Laugier, A. ; Cachard, A.

Pub. info.:	Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.419-424, 1983. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	13

Conference Proceedings

9. PULSED ELECTRON BEAM ANNEALING INDUCED DEEP LEVEL DEFECTS IN VIRGIN SILICON

Barbier, D. ; Kechouane, M. ; Chantre, A. ; Laugier, A.

Pub. info.:	Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.449-454, 1983. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	13

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Conference Proceedings

10. EFFETCS OF HEATING SAMPLES ON THE EXTENDED DEFECT GENERATION DURING PULSED ELECTRON BEAM ANNEALING OF SILICON

Pitaval, M. ; Ambri, M. ; Tholomier, M. ; Barbier, D. ; Chemisky, G. ; Laugier, A.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.363-368, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

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Author: Laugier, A.