Toh, S.L. ; Loh, K.P. ; See, K.S. ; Boothroyd, O.B. ; Li, K. ; Lau, W.S. ; Ang, C.H. ; Chan, L.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.562-568, 2005. Pennington, NJ. Electrochemical Society
Lau, W.S. ; Zhong, L. ; Han, Taejoon ; Sandler, Nathan P.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.99-104, 2005. Warrendale, Pa.. Materials Research Society
Lau, W.S. ; Zhang, G. ; Leong, L.L. ; Han, Taejoon ; Das, J. ; Sandler, Nathan P. ; Chu, P.K.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.181-188, 2005. Warrendale, Pa.. Materials Research Society