1.

Conference Proceedings
Conference Proceedings
1. Non-Contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-Shallow (and Other) Junctions
Faifer, Vladimir N. ; Current, Michael I. ; Walecki, Wojtek ; Soucnkov, Vitali ; Mikhaylov, Georgy ; Van, Phuc ; Wong, Tim ; Nguyen, Tan ; Lu, Jiansong ; Lau, S.H. ; Koo, Ann
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.475-480,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings
Conference Proceedings
2. Low Coherence Interferometric Metrology for Ultra-Thin MEMs Structure
Walecki, Wojciech ; Wei, Frank ; Van, Phuc ; Lai, Kevin ; Lee, Tim ; Soucnkov, Vitali ; Lau, S.H. ; Koo, Ann
Pub. info.: Nanoengineered assemblies and advanced micro/nanosystems : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.189-194,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 820
3.

Conference Proceedings
Conference Proceedings
3. Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures
Walecki, W. ; Wei, F. ; Van, P. ; Lai, K. ; Lee, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS III.  pp.55-62,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5343
4.

Conference Proceedings
Conference Proceedings
4. Low-coherence interferometric absolute distance gauge for study of MEMS structures
Walecki, W.J. ; Lai, K. ; Pravdivtsev, A. ; Souchkov, V. ; Van, P. ; Azfar, T. ; Wong, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV.  pp.182-188,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5716