1.

Conference Proceedings

Conference Proceedings
Hagleitner,C. ; Lange,D. ; Akiyama,T. ; Tonin,A. ; Vogt,R. ; Baltes,H.
Pub. info.: Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California.  pp.240-248,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3673
2.

Conference Proceedings

Conference Proceedings
Hierlemann,A. ; Koll,A. ; Lange,D. ; Hagleitner,C. ; Kerness,N. ; Brand,O. ; Baltes,H.
Pub. info.: Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts.  pp.158-169,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3857
3.

Conference Proceedings

Conference Proceedings
Brand,O. ; Hornung,M. ; Lange,D. ; Baltes,H.
Pub. info.: Micromachined Devices and Components IV.  pp.238-250,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
4.

Conference Proceedings

Conference Proceedings
Baltes,H. ; Lange,D. ; Koll,A.
Pub. info.: Micromachined Devices and Components III.  pp.2-13,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224