Boerner, M. ; Landau, S. ; Metz, S. ; Kolbesen, B.O.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.338-350, 1997. Pennington, NJ. Electrochemical Society
Landau, S. ; Kolbesen, B.O. ; Tillman, R. ; Bruchhaus, R. ; Olbrich, A. ; Fritsch, B. ; Dehm, C. ; Schindler, G. ; Hartner, W. ; Mazure, C.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.789-797, 1998. Pennington, NJ. Electrochemical Society