Lakshmanan, Annamalai ; Gopal, Vidyut ; King, Alexander H. ; Kvam, Eric P.
Pub. info.:
Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Lee, Albert S. ; Lakshmanan, Annamalai ; Rajagopalan, Nagarajan ; Cui, Zhenjiang ; Le, Maggie ; Xia, Li Qun ; Kim, Bok Heon ; M'Saad, Hichem
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.221-226, 2004. Warrendale. Materials Research Society