1.

Conference Proceedings
Conference Proceedings
1. Metal etch process defects
Lu,T.-Y. ; Hwang,Y.-K. ; Lai,C.-H. ; Chen,S.-F. ; Chen,C.-H.
Pub. info.: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.173-179,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3742
2.

Conference Proceedings
Conference Proceedings
2. Optical and thermal properties of SiNx for MO disks
Lai,C.-H. ; Huang,C.-L. ; Hsu,C.-Y. ; Lin,I-N. ; Jou,J.-H.
Pub. info.: Optical Storage and Optical Information Processing.  pp.28-35,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4081