1.

Conference Proceedings
Conference Proceedings
1. Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.97-102,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
2.

Conference Proceedings
Conference Proceedings
2. Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.325-332,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875