1.
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Conference Proceedings
|
Tsai,W. ; Qian,Q. ; Buckmann,K.M. ; Cheng,W.-H. ; He,L. ; Irvine,B. ; Kamna,M. ; Korobko,Y. ; Kovalchick,M. ; Labovitz,S.M. ; Talevi,R. ; Farnsworth,J.N.
Pub. info.: |
20th Annual BACUS Symposium on Photomask Technology. pp.433-443, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4186 |
|
2.
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Conference Proceedings
|
Tsai,W. ; Chen,F. ; Kamna,M. ; Chegwidden,S. ; Labovitz,S.M. ; Farnsworth,J.N. ; Dao,G.T.
Pub. info.: |
Photomask and X-Ray Mask Technology V. pp.149-162, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3412 |
|