1.

Conference Proceedings
Conference Proceedings
1. Performance trade-offs for a surface micromachined microengine
Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.
Pub. info.: Micromachined devices and components II : 14-15 October 1996, Austin, Texas.  pp.182-191,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2882
2.

Conference Proceedings
Conference Proceedings
2. Thin Teflon-like films for MEMS: film properties and reliability studies
Smith,B.K. ; Brown,C.D. ; LaVigne,G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.114-124,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
3.

Conference Proceedings
Conference Proceedings
3. Friction in surface-micromachined microengines
Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.197-204,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722