Cheung, Andres W. ; Lo, G. Q. ; Kwong, Dim-Lee ; Alvi, N. S. ; Kermani, a.
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Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.483-488, 1989. Pittsburgh, Pa.. Materials Research Society
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.379-384, 1991. Pittsburgh, Pa.. Materials Research Society
Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.. pp.217-222, 2002. Warrendale, Pa.. Materials Research Society
Yu, Xiongfei ; Zhu, Chunxiang ; Hu, Hang ; Chin, Albert ; Li, M. F. ; Cho, B. J. ; Kwong, Dim-Lee ; Foo, P. D. ; Yu, M. B.
Pub. info.:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.357-362, 2003. Warrendale, Pa.. Materials Research Society