1.

Conference Proceedings
Conference Proceedings
1. Comparison study for sub-150-nm DUV lithography between high-NA KrF and ArF lithography
Yim,D. ; Kwon,K.-S. ; Ham,Y.-M. ; Baik,K.-H.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.138-149,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Analysis of nonlinear overlay errors by aperture mixing related with pattern asymmetry
Lim,C.-M. ; Kwon,K.-S. ; Yim,D. ; Son,D.-H. ; Kim,H.-S. ; Baik,K.-H.
Pub. info.: Optical Microlithography X.  pp.106-115,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051