1.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.79-87,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  4409  pp.382-389,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
3.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.218-225,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
4.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Oh,K.-S. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.532-539,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186