1.

Conference Proceedings
Conference Proceedings
1. Model building, control design, and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)
Wolfram, H. ; Schmiedel, R. ; Hiller, K. ; Aurich, T. ; Gunther, W. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; GeBner, T.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.326-340,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Investigation of heat transfer in micromirrors
Kehr, K. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; Cessner, T.
Pub. info.: Microsystems Metrology and Inspection.  pp.24-35,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825
3.

Conference Proceedings
Conference Proceedings
3. Application of micromirror arrays for Hadamard transform optics
Hanf, M. ; Kurth, S. ; Billep, D. ; Hahn, R. ; Faust, W. ; Heinz, S. ; Doetzel, W. ; Gessner, T.
Pub. info.: Microwave and Optical Technology 2003.  pp.128-131,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5445
4.

Conference Proceedings
Conference Proceedings
4. An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: Microwave and Optical Technology 2003.  pp.95-100,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5445
5.

Conference Proceedings
Conference Proceedings
5. Tunable Fabry-Perot interferometer for 3- to 4.5-μm wavelength with bulk micromachined reflector carrier
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.215-226,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
6.

Conference Proceedings
Conference Proceedings
6. A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S. ; Kaufmann, C. ; Hahn, R. ; Mehner, J. ; Dotzel, W. ; Gessner, T.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.23-33,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721