Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.567-572, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tanaka, H. ; Kuriyama, N. ; Ichikawa, S. ; Senoh, H. ; Naka, N. ; Aihara, K. ; Itoh, H. ; Tsukahara, M.
Pub. info.:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.2481-2484, 2005. Uetikon-Zuerich. Trans Tech Publications