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Conference Proceedings
Conference Proceedings
1. SELECTIVE-AREA LASER PHOTODEPOSITION OF TRANSPARENT CONDUCTIVE SnO2 FILMS
Kunz, R.R. ; Rothschild, M. ; Ehrlich, D.J.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.447-454,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. SURFACE CHEMICAL REACTIONS STIMULATED BY LOW ENERGY ELECTRON BOMBARDMENT
Kunz, R.R. ; Mayer, T.M.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.609-618,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
3.

Conference Proceedings
Conference Proceedings
3. Fluorocarbon Polymer-Based Photoresists for 157-nm Lithography
Fedynyshyn, T.H. ; Mowers, W.A. ; Kunz, R.R. ; Sinta, R.F. ; Sworin, M. ; Cabral, A. ; Curtin, J.
Pub. info.: Polymers for microelectronics and nanoelectronics.  pp.54-71,  2004.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 874
4.

Conference Proceedings
Conference Proceedings
4. Using scanning electrochemical microscopy to probe chemistry at the solid-liquid interface in chemically amplified immersion lithography
LeSuer, R.J. ; Fan, F.-R.F. ; Bard, A.J. ; Taylor, J.C. ; Tsiartas, P. ; Willson, G. ; Conley, W.E. ; Feit, G. ; Kunz, R.R.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.115-125,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
5.

Conference Proceedings
Conference Proceedings
5. Photoresist outgassing: a potential Achilles heel for short-wavelength optical lithography?
Kunz, R.R.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1-15,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
6.

Conference Proceedings
Conference Proceedings
6. Immersion liquids for lithography in the deep ultraviolet
Switkes, M. ; Kunz, R.R. ; Sinta, R.F. ; Rothschild, M. ; Gallagher-Wetmore, P.M. ; Krukonis, V.J. ; Williams, K.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.690-699,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
7.

Conference Proceedings
Conference Proceedings
7. 157-nm pellicles: polymer design for transparency and lifetime
French, R.H. ; Wheland, R.C. ; Qiu, W. ; Lemon, M.F. ; Blackman, G.S. ; Zhang, E. ; Gordon, J. ; Liberman, V. ; Grenville, A. ; Kunz, R.R. ; Rothschild, M.
Pub. info.: Optical Microlithography XV.  Part One  pp.576-583,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
8.

Conference Proceedings
Conference Proceedings
8. High-resolution fluorocarbon-based resist for 157-nm lithography
Fedynyshyn, T.H. ; Mowers, W.A. ; Kunz, R.R. ; Sinta, R.F. ; Sworin, M. ; Goodman, R.B.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.29-40,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
9.

Conference Proceedings
Conference Proceedings
9. Monolithic detector array comprised of >1000 aerial image sensing elements
Kunz, R.R. ; Rathman, D.D. ; Spector, S.J. ; Yeung, M.S.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1441-1455,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
10.

Conference Proceedings
Conference Proceedings
10. Scattering in liquid immersion lithography
Switkes, M. ; Bloomstein, T.M. ; Kunz, R.R. ; Rothschild, M. ; Ruberti, J.W. ; Shedd, T.A. ; Yeung, M.S.
Pub. info.: Optical Microlithography XVII.  pp.469-476,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377