1.

Conference Proceedings
Conference Proceedings
1. INFLUENCE OF THE SOI SURFACE MORPHOLOGY ON CRYSTAL ORIENTATION AND DEVICE CHARACTERISTICS
Kunio, T. ; Oyama, K. ; Enomoto, T.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.409-414,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. CONTROL OF NATiVE OXIDES ON DEEP-SUBMICRON CONTACT-HOLE-BOTTOM SURFACES
Aoto, N. ; Nakamori, M. ; Hada, H. ; Kunio, T. ; Teraoka, Y. ; Nishiyama, I. ; Ikawa, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.65-69,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7