1.

Conference Proceedings
Conference Proceedings
1. Pattern-dependence optical phase effect on alternating phase shift mask
Chang, B.-C. ; You, J.-W. ; Lu, M. ; Lee, C.-L. ; Kung, L.-W. ; Shu, K.-C. ; Shin, J.-J. ; Gau, T.-S. ; Lin, B.J.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.745-755,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
2.

Conference Proceedings
Conference Proceedings
2. Alt- PSM of contact with phase-assist feature for 65-nm node
You, J.-W. ; Shin, J.-J. ; Chang, C.-H. ; Kung, L.-W. ; Chang, B.-C. ; Dai, C.-M. ; Gau, T.-S. ; Lin, B.J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1263-1272,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889