1.

Conference Proceedings
Conference Proceedings
1. Ultra-line-narrowed F2 laser for microlithography
Komori,H. ; Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.424-428,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
2.

Conference Proceedings
Conference Proceedings
2. Development of curved planar reconstruction image using virtual endoscopy
Taniguchi,H. ; Goto,Y. ; Hayashi,H. ; Kumazaki,T.
Pub. info.: Medical Imaging 2001: Physics of Medical Imaging.  pp.914-923,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4320
3.

Conference Proceedings
Conference Proceedings
3. Spectral measurement of ultra line-narrowed F2 laser
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
4.

Conference Proceedings
Conference Proceedings
4. Challenge of the F2 laser for dioptric projection system
Ariga,T. ; Watanabe,H. ; Kumazaki,T. ; Kitatochi,N. ; Sasano,K. ; Ueno,Y. ; Nishisaka,T. ; Nohdomi,R. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.1158-1165,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346