Optomechanical engineering and vibration control : 20-23 July 1999, Denver, Colorado. pp.162-178, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany. pp.861-871, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.422-431, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.365-371, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.325-335, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.192-203, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Materials and Device Characterization in Micromachining II. pp.210-220, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering