1.

Conference Proceedings
Conference Proceedings
1. Nitric Oxide Rapid Thermal Nitridation of Thin Gate Oxides
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. E. ; Lopes, D.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.381-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. Nitrogen Profile Engineering in Thin Gate Oxides
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. ; Lopes, D. ; Tauber, R.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.181-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525