Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.143-148, 1992. Pittsburgh, Pa.. Materials Research Society
Nakagawa, T. ; Miyatake, H. ; Maeda, T. ; Kuroda, K. ; Tokushige, N. ; Inoue, R. ; Kudo, J. ; Ashida, T.
Pub. info.:
Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.425-432, 1991. Pittsburgh, Pa.. Materials Research Society
Konushi, F. ; Seki, A. ; Kudo, J. ; Sato, H. ; Kakimoto, S. ; Fukushima, T. ; Kubota, Y. ; Koba, M.
Pub. info.:
Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.307-312, 1988. Pittsburgh, Pa.. Materials Research Society
Kudo, J. ; Nagata, M. ; Ogata, N. ; Yamazaki, S. ; Urashima, H. ; Okutoh, A. ; Miyoshi, T. ; Ishihara, K.
Pub. info.:
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.61-, 1999. Warrendale, PA. MRS - Materials Research Society
Nakagawa, T. ; Miyatake, H. ; Maeda, T. ; Kuroda, K. ; Tokushige, N. ; Inoue, R. ; Kudo, J. ; Ashida, T.
Pub. info.:
Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.167-176, 1991. Pittsburgh, Pa.. Materials Research Society