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Conference Proceedings

1. Hydrogen-Induced Amorphization of SmFe3

Kubis, M. ; Handstein, A. ; Gebel, B. ; Gutfleisch, O. ; Muller, K. -H. ; Schultz, L.

Pub. info.:	Metastable, mechanically alloyed and nanocrystalline materials : ISMANAM-99 : proceedings of the International Symposium on Metastable, Mechanically Alloyed and Nanocrystalline Materials (ISMANAM-99), held in Dresden, Germany, August 30-September 3, 1999. pp.557-561, 2000. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	343-346(2)

Conference Proceedings

2. Synthesis of Amorphous and Nanostructured Materials by Gas Solid Reactions

Muller, K. -H. ; Kubis, M. ; Oleinek, Ph. ; David, G. ; Handstein, A. ; Gutfleisch, O. ; Schultz, L.

Pub. info.:	Metastable, mechanically alloyed and nanocrystalline materials : ISMANAM 98 : proceedings of the International Symposium on Metastable, Mechanical Alloyed and Nanocrystalline Materials (ISMANAM 98), held in Wollongong(Sydney), Australia, December 1998. pp.23-32, 1999. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	312-314

Conference Proceedings

3. Hydrogen Disproportionation by Reactive Milling and Recombination of Nd2Fe14B and Nd2CO14B Alloys

Gutfleisch, O. ; Bollero, A. ; Kubis, M. ; Muller, K. -H. ; Schultz, L.

Pub. info.:	Metastable, mechanically alloyed and nanocrystalline materials : ISMANAM-99 : proceedings of the International Symposium on Metastable, Mechanically Alloyed and Nanocrystalline Materials (ISMANAM-99), held in Dresden, Germany, August 30-September 3, 1999. pp.405-410, 2000. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	343-346(1)

Conference Proceedings

4. *Hydrogenation disproportionation desorption recombination processes applied to NdFeB-, SmFe- and SmCo- type alloys

Gutfeisch, O. ; Kubis, M. ; Handstein, A. ; Muller, K-M. ; Schultz, L.

Pub. info.:	Advanced hard and soft magnetic materials : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.3-, 1999. Warrendale. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	577

Conference Proceedings

5. Anisotropic Bonded Sm2.3Fe16.8Zr0.2Ny Magnets Prepared by Milling of as Cast Material

Gebel, B. ; Kubis, M. ; Roessler, U.K. ; Mueller, K.-H.

Pub. info.:	European magnetic materials and applications : proceedings of the 8th European Magnetic Materials and Applications Conference, Kyiv, Ukraine, June 7-10, 2000. pp.317-320, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	373-376

Conference Proceedings

6. Mask manufacturing mix-and-match in front-end wafer processing

Frangen, A. ; Jakob, R. ; Kubis, M.

Pub. info.:	24th Annual BACUS Symposium on Photomask Technology. pp.1067-1075, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5567

Conference Proceedings

7. Critical dimension variations of I-line processes due to swing effects [6152-153]

Berger, C. ; Schiwon, R. ; Trepte, S. ; Friedrich, M. ; Kubis, M. ; Horst, J ; Grandpierre, A. G.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XX. pp.61523T-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6152

Conference Proceedings

8. Comparison of I-line and DUV high-energy implant litho processes [6152-155]

Grandpierre, A G. ; Berger, C. ; Schroeder, U. P. ; Schiwon, R. ; Kubis, M.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XX. pp.61523V-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6152

Conference Proceedings

9. In field overlay uncertainty contributors

Schiwon, R. ; Grandpierre, A. G. ; Kubis, M. ; Schroder, U. P.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XIX. pp.51-58, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5752

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Conference Proceedings

10. Matching OPC and masks on 300-mm lithography tools utilizing variable illumination settings

Palitzsch, K. ; Kubis, M. ; Schroeder, U.P. ; Schumacher, K. ; Frangen, A.

Pub. info.:	Optical Microlithography XVII. pp.872-880, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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Author: Kubis, M.