1.

Conference Proceedings
Conference Proceedings
1. RAPID THERMAL CHEMICAL VAPOR DEPOSITION: SELECTIVE EPITAXIAL SILICON GROWTH (SEG)
Osenback, J. W. ; Ku, Y. H. ; Kermani, A.
Pub. info.: Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.33-38,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 198
2.

Conference Proceedings
Conference Proceedings
2. GROWTH OF THIN EPITAXIAL SILICON LAYERS ON HEAVILY DOPED SUBSTRATES BY TRP-CVD
Lee, S. K. ; Ku, Y. H. ; Kwong, D. L.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.127-132,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
3.

Conference Proceedings
Conference Proceedings
3. A SELF-ALIGNED SILICIDE TECHNOLIGY USING ION-BEAM MIXING, DOPED SILICIDE AND RAPID THERMAL PROCESSING
Ku, Y. H. ; Lee, S. K. ; Kwong, D. L. ; Chu, P.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.249-254,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
4.

Conference Proceedings
Conference Proceedings
4. *RAPID THERMAL PROCESSING:FOR SELF-ALIGNED SILICIDE TECHNOLOGY
Ku, Y. H. ; Lee, S. K. ; Louis, E., ; Shih, D. K. ; Kwong, D. L.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.155-164,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92