Chen, C.-J. ; Lai, S.-H. ; Lee, W.-H. ; Lin, C.-Y. ; Ku, T. ; Chen, C.-H. ; Chung, Y.-C.
Pub. info.:
Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA. pp.600008-600008, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering