1.

Conference Proceedings
Conference Proceedings
1. A Study on the Solid Phase Reaction and Thermal Stability in the Ni-Sil-x Gex System Using Rapid Thermal Annealing (RTA) Process
Choi, H.-J. ; Kim, H.-Y. ; Ko, D.-H. ; Ku, J.-H. ; Choi, C.-J. ; Choi, S. ; Fujihara, K. ; Kang, H.K. ; Yang, M-H. ; Yang, C.-W.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.591-600,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings
Conference Proceedings
2. Formation and Properties of Co-Suicide by Using Col-x Tax Alloy
Kim, M.-J. ; Lee, D.-H. ; Ko, D.-H. ; Ku, J.-H. ; Choi, S. ; Fujihara, K. ; Kang, H.-K. ; Oh, S-H. ; Park, C.-G. ; Lee, H.-J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.571-580,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
3.

Conference Proceedings
Conference Proceedings
3. Ni Salicide Technology for Deep Sub-Quarter Micron Transistor
Choi, C.-J. ; Ku, J.-H. ; Choi, S. ; Fujihara, K. ; Kang, H.-K. ; Moon, J.-T. ; Choi, H.-J. ; Ko, D.-H.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.565-570,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2