1.

Conference Proceedings
Conference Proceedings
1. STRESS AND MICROSTRUCTURE IN PHOSPHORUS DOPED POLYCRYSTALLINE SILICON
Krulevitch, P. ; Johnson, G.C. ; Howe, R.T.
Pub. info.: Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.79-84,  1992.  Philadelphia, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 276
2.

Conference Proceedings
Conference Proceedings
2. STRESS AND MICROSTRUCTURE IN LPCVD POLYCRYSTALLINE SILICON FILMS: EXPERIMENTAL RESULTS AND CLOSED FORM MODELING OF STRESSES
Krulevitch, P. ; Johnson, G. C. ; Howe, R. T.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.13-18,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
3.

Conference Proceedings
Conference Proceedings
3. Curvature of a Cantilever Beam Subjected to an Equi-Biaxial Bending Moment
Krulevitch, P. ; Johnson, G. C.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.67-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
4.

Conference Proceedings
Conference Proceedings
4. STRESS-CORROSION CRACKING AND BLISTERING OF THIN POLYCRYSTALLINE SILICON FILMS IN HYDROFLUORIC ACID
Monk, D. J. ; Krulevitch, P. ; Howe, R. T. ; Johnson, G. C.
Pub. info.: Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.641-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 308
5.

Conference Proceedings
Conference Proceedings
5. Polysilicon surface-micromachined spatial light modulator with novel electronic integration
Dimas, C.E. ; Bifano, T.G. ; Bierden, P.A. ; Perrault, J.A. ; Krulevitch, P. ; Roehnelt, R.T. ; Cornelissen, S.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.477-484,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755