Gruen, D.M. ; Krauss, A.R. ; Zhou, D. ; McCauley, T.G. ; Corrigan, T.D. ; Chang, R.P.H. ; Swain, G.M.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.325-332, 1997. Pennington, NJ. Electrochemical Society
Sumant, A.V. ; Auciello, O. ; Krauss, A.R. ; Gruen, D.M. ; Ersoy, D. ; Tucek, J. ; Jayatissa, A. ; Stach, E. ; Moldovan, N. ; Mancini, D. ; Busmann, H.G. ; Meyer, E.M.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society