1.

Conference Proceedings
Conference Proceedings
1. Remote plasma nitrided oxides for ultrathin gate dielectric applications (Invited Paper)
Hattangady,S.V. ; Grider,O.T. ; Kraft,R. ; Shiau,W.-T. ; Douglas,M.A. ; Nicollian,P. ; Rodder,M. ; Brown,G.A. ; Chatterjee,A. ; Hu,J.C. ; Aur,A. ; Tsai,H.-L. ; Chapman,R.A. ; Eklund,R.H. ; Chen,I.C. ; Pas,M.F.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.30-40,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings
Conference Proceedings
2. Shallow p-type source/drain extension formation using B2H6 plasma doping for deep submicron CMOS
Hu,J.C. ; Kraft,R. ; Rodder,M. ; Chen,I.-C.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.82-90,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506