1.

Conference Proceedings
Conference Proceedings
1. GaAs photoconductors for submillimeter astronomy:liquid phase epitaxial growth of GaAs layers
Abe,O. ; Murakami,H. ; Okamura,Y. ; Wakaki,M. ; Yakawa,T. ; Koyama,M. ; Ogawa,T.
Pub. info.: Infrared technology and applications XXV : 5-9 April 1999, Orlando, Florida.  pp.603-611,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3698
2.

Conference Proceedings
Conference Proceedings
2. Fast EB-PEC system for 0.25-ｦﾌm device reticle fabrication using a variable shaped beam machine
Tomita,M. ; Ohnuma,H. ; Koyama,M. ; Kawahira,H.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.546-557,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621