1.

Conference Proceedings
Conference Proceedings
1. Single Wafer Polymer Removal for <0.25mm Technology
Gaulhofer, E. ; Kruwinus, H.-.1. ; Kovacs, F. ; Haigermoser, C.
Pub. info.: Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX).  pp.47-51,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-4
2.

Conference Proceedings
Conference Proceedings
2. CLEANING OF METAL GATE STACKS FOR THE SUB 90 nm TECHNOLOGY NODE
Snow, J. ; Kraus, H. ; Vermeyen, K. ; Fyen, W. ; Mertens, P. ; Kovacs, F.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.393-399,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
3.

Conference Proceedings
Conference Proceedings
3. The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results
Fleurot, N.A. ; Adolf, A. ; Andre, M. ; Bruneau, J.L. ; Cavailler, C. ; Novaro, M. ; Philippe, P. ; Kovacs, F. ; Garrec, B.Le. ; Di Nicola, J.M. ; Leidinger, J.P.
Pub. info.: 25th International Congress on High-Speed Photography and Photonics.  pp.418-424,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4948