Reif, J. ; Costache, F. ; Eckert, S. ; Kouteva-Arguirova, S. ; Bestehorn, M. ; Georgescu, I. ; Semerok, A. F. ; Martin, P. ; Gobert, O. ; Seifert, W.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.737-742, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ratzke, M. ; Kappa, M. ; Wolfframm, D. ; Kouteva-Arguirova, S. ; Reif, J.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.406-411, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering