Kotani, T. ; Kyoh, S. ; Kobayashi, S. ; Inazu, T. ; Ikeuchi, A. ; Urakawa, Y. ; Inoue, S. ; Morita, E. ; Klaver, S. ; Horiuchi, T. ; Peeters, J. ; Kuramoto, S.
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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560H-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kyoh, S. ; Kotani, T. ; Kobayashi, S. ; Ikeuchi, A. ; Inoue, S.
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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kotani, T. ; Ichikawa, H. ; Kobayashi, S. ; Nojima, S. ; Izuha, K. ; Tanaka, S. ; Inoue, S.
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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.219-229, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kotani, T. ; Perrin, G. S. ; Woillez, J. ; Gverin, J. ; Maze, G.
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New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.647-654, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Guyon, O. ; Ridgway, S. ; Aime, C. ; Boccaletti, A. ; Beuzit, J. L. ; Galicher, R. ; Kern, P. ; Kotani, T. ; Lagrange, A. M. ; Lyon, R. G. ; Malbet, F. ; Murakawa, K. ; Otsubo, M. ; Rouan, D. ; Soummer, R. ; Suto, H. ; Tamura, M. ; Woodruff, R. A.
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Optical, infrared, and millimeter space telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.1304-1311, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Perrin, G. S. ; Lai, O. ; Woillez, J. ; Guerin, J. ; Kotani, T. ; Vergnole, S. ; Adamson, A. J. ; Ftaclas, C. ; Guyon, O. ; Lona, P. ; Nishikawa, J. ; Reynaud, F. ; Roth, K. ; Ridgway, S. T. ; Tokunaga, A. T. ; Wizinowich, P. L.
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New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.391-404, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Nishikawa, J. ; Yoshizawa, M. ; Ohishi, N. ; Suzuki, S. ; Torii, Y. ; Matsuda, K. ; Kubo, K. ; Iwashita, H. ; Yokoi, T. ; Kotani, T. ; Sato, K.
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New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.520-527, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kotani, T. ; Tanaka, S. ; Nojima, S. ; Hashimoto, K. ; Inoue, S. ; Mori, I.
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Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.128-138, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kotani, T. ; Ichikawa, H. ; Urakami, T. ; Nojima, S. ; Kobayashi, S. ; Oikawa, Y. ; Tanaka, S. ; Ikeuchi, A. ; Suzuki, K. ; Inoue, S.
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Photomask and Next-Generation Lithography Mask Technology X. pp.628-637, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering