1.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Kyoh, S. ; Kobayashi, S. ; Inazu, T. ; Ikeuchi, A. ; Urakawa, Y. ; Inoue, S. ; Morita, E. ; Klaver, S. ; Horiuchi, T. ; Peeters, J. ; Kuramoto, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Kyoh, S. ; Kotani, T. ; Kobayashi, S. ; Ikeuchi, A. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Ichikawa, H. ; Kobayashi, S. ; Nojima, S. ; Izuha, K. ; Tanaka, S. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.219-229,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
4.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Perrin, G. S. ; Woillez, J. ; Gverin, J. ; Maze, G.
Pub. info.: New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.647-654,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5491
5.

Conference Proceedings

Conference Proceedings
Guyon, O. ; Ridgway, S. ; Aime, C. ; Boccaletti, A. ; Beuzit, J. L. ; Galicher, R. ; Kern, P. ; Kotani, T. ; Lagrange, A. M. ; Lyon, R. G. ; Malbet, F. ; Murakawa, K. ; Otsubo, M. ; Rouan, D. ; Soummer, R. ; Suto, H. ; Tamura, M. ; Woodruff, R. A.
Pub. info.: Optical, infrared, and millimeter space telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1304-1311,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5487
6.

Conference Proceedings

Conference Proceedings
Perrin, G. S. ; Lai, O. ; Woillez, J. ; Guerin, J. ; Kotani, T. ; Vergnole, S. ; Adamson, A. J. ; Ftaclas, C. ; Guyon, O. ; Lona, P. ; Nishikawa, J. ; Reynaud, F. ; Roth, K. ; Ridgway, S. T. ; Tokunaga, A. T. ; Wizinowich, P. L.
Pub. info.: New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.391-404,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5491
7.

Conference Proceedings

Conference Proceedings
Nishikawa, J. ; Yoshizawa, M. ; Ohishi, N. ; Suzuki, S. ; Torii, Y. ; Matsuda, K. ; Kubo, K. ; Iwashita, H. ; Yokoi, T. ; Kotani, T. ; Sato, K.
Pub. info.: New frontiers in stellar interferometry : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.520-527,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5491
8.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Tanaka, S. ; Nojima, S. ; Hashimoto, K. ; Inoue, S. ; Mori, I.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.128-138,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
9.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Ichikawa, H. ; Urakami, T. ; Nojima, S. ; Kobayashi, S. ; Oikawa, Y. ; Tanaka, S. ; Ikeuchi, A. ; Suzuki, K. ; Inoue, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.628-637,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
10.

Conference Proceedings

Conference Proceedings
Tanaka, S. ; Inoue, S. ; Kotani, T. ; Izuha, K. ; Mori, I.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.23-32,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130