1.

Conference Proceedings
Conference Proceedings
1. High Density Plasma Gate Etching of 0.12 um Devices with Sub-1.5 nm Gate Oxides
Klemens, F.P. ; Baumann, F.H. ; Kornblit, A. ; Layadi, N. ; Lee, H. ; Maynard, H.L. ; Mytych, J.M. ; Sorch, T.W. ; Tennant, D.M. ; Timp, G.L. ; Lee, J.T.C.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.85-95,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
2.

Conference Proceedings
Conference Proceedings
2. The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions
Hergenrother, J.M. ; Oh, S.H. ; Nigam, T. ; Monroe, D. ; Klemens, F.P. ; Kornblit, A. ; Baumann, F.H. ; Grazul, J.L. ; Johnson, R.W. ; King, C.A. ; Kleiman, R.N.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.381-392,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
3.

Conference Proceedings
Conference Proceedings
3. Imaging with single-dimension kinoform lenses
Stein, A. ; Ablett, J.M. ; Evans-Lutterodt, K. ; Taylor, A. ; Klemens, F. ; Kornblit, A. ; Polvino, S.
Pub. info.: Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA.  pp.80-87,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5539
4.

Conference Proceedings
Conference Proceedings
4. *Gate technology issues for silicon MOS nanotransistors
Tennant, D. M. ; Timp, G. L. ; Ocola, L. E. ; Green, M. ; Sorsch, T. ; Kornblit, A. ; Klemens, F. ; Kleiman, R. ; Muller, D. A. ; Kim, Y. ; Timp, W.
Pub. info.: Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.283-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 584
5.

Conference Proceedings
Conference Proceedings
5. A Comparison of Three Low Dielectric Constant Organic Polymers
Case, C. B. ; Case, C. J. ; Kornblit, A. ; Mills, M. E. ; Castillo, D. ; Liu, R.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.177-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
6.

Conference Proceedings
Conference Proceedings
6. Processing Challenges in the Fabrication of Advanced MEMs
Kornblit, A. ; Aksyuk, V. A. ; R Bogart, G. ; Bolle, C. ; Bower, J.E. ; Cirelli, R. A. ; Ferry, E. ; Fetter, L. ; Gasparyan, A. ; Greywall, D. S. ; Keller, R. C. ; Klemens, F. P. ; Lai, W. Y.-C. ; Lopez, O. D. ; Mansfield, W. M. ; Miner, J. F. ; Pai, C.-S. ; Pardo, F. ; Pan, S. ; Simon, M. E. ; Sorsch, T. ; Taylor, J. A. ; Tennant, D. M. ; Watson, G. P. (Invited Talk)
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.11-25,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
7.

Conference Proceedings
Conference Proceedings
7. The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET
Oh, Sang-Hyun ; Hergenrdther, Jack ; Monroe, Don ; Nigam, T. ; Klemens, F.P. ; Kornblit, A. ; Mansfield, W.M. ; Baumaun, F.H. ; Gossmann, H.J. ; King, C.A. ; Kleiman, R, N. ; Vuong, H.-H. ; Weber, G.R. ; Rafferty, C.S.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B3.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
8.

Conference Proceedings
Conference Proceedings
8. Nanoscale Electronic Devices The Nano-Transistor
Timp, G. ; Baumann, F. ; Bude, J. ; Bourdelle, K.K. ; Green, M. ; Grazul, J. ; Chetti, A. ; Forsyth, G. ; Kleiman, R. ; Kiemens, F. ; Kornblit, A. ; Lyding, J. ; Mansfield, W. ; Muller, D. ; Sorsch, T. ; Tennant, D. ; Timp, W. ; Tung, R. ; Yu, J.
Pub. info.: Quantum confinement VI: nanostructured materials and devices : proceedings of the international symposium.  pp.55-69,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-19