1.

Conference Proceedings
Conference Proceedings
1. COMPOUND SIDEWALL SPACER TECHNOLOGY FOR SUBMICRON MOSFET
Roy, P.K. ; Kook, T. ; Kizilyalli, I.C. ; Nanda, A.K.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.449-456,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. THE EFFECT OF WINDOW EDGE STRESS ON DOPANT DIFFUSION IN SILICON
Huang, C.K. ; Kook, T. ; Jaccodine, R.J.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.277-282,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
3.

Conference Proceedings
Conference Proceedings
3. DIFFUSION OF DOPANTS IN (111) SILICON DURING HIGH TEMPERATURE HEAT TREATMENT IN NITROGEN
Kook, T. ; Jaccodine, R. J.
Pub. info.: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.83-88,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 36
4.

Conference Proceedings
Conference Proceedings
4. EFFECT OF HEAVY DOPING ON THE NUCLEATION AND GROWTH OF BULK STACKING FAULTS IN SILICON
Pearce, C. W. ; Kook, T. ; Jaccodine, R. J.
Pub. info.: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.231-238,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 36
5.

Conference Proceedings
Conference Proceedings
5. IMPACT OF VARIOUS POLYSILICON DEPOSITION PROCESS ON THIN GATE-OXIDE PROPERTIES IN SUBMICRON CMOS TECHNOLOGY
Rot, P. K. ; Kook, T. ; Kannan, V. C. ; Felton, G. J. ; Powell, R. A. ; Velaga, A. N.
Pub. info.: Polysilicon thin films and interfaces.  pp.281-286,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182