1.

Conference Proceedings
Conference Proceedings
1. The Best Way to Obtain Good Quality CVD-TiN Films From TiCl4 and NH3
Hamamura, Hirotaka ; Shimogaki, Yukihiro ; Akiyama, Yasunobu ; Egashira, Yasuyuki ; Komiyama, Hiroshi
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.501-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. OXYGEN-INDUCED REVERSIBLE STRUCTURAL CHANGE OF SUPPORTED FINE SILVER PARTICLES OBSERVED BY IN SITU OPTICAL ABSORPTION AND X-RAY DIFFRACTION
Yanase, Akihisa ; Komiyama, Hiroshi ; Tanaka, Kazunobu
Pub. info.: Physical phenomena in granular materials : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.31-36,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 195