1.

Conference Proceedings
Conference Proceedings
1. Holographic interferometry on DDT induced by microfragments
Komatsu,M. ; Takayama,K.
Pub. info.: 24th International Congress on High-Speed Photography and Photonics : 24-29 September 2000, Sendai, Japan.  pp.713-723,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4183
2.

Conference Proceedings
Conference Proceedings
2. Study of Electron Irradiation-Induced Defects of 3c-SiC and Diamond by Ultra-High Voltage Electron Microscopy
Oshima,R. ; Nie,C.Y. ; Komatsu,M. ; Mori,H.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1237-1242,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
3.

Conference Proceedings
Conference Proceedings
3. Double-step process for manufacturing reticle to reduce gate CD variation
Kozuma,M. ; Komatsu,M. ; Arakawa,R. ; Kubo,S. ; Takahashi,T. ; Jensen,J. ; Bang,H.S. ; Lee,I.H. ; Shin,C. ; Kim,H.-S. ; Park,K.W.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.787-792,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
4.

Conference Proceedings
Conference Proceedings
4. Manufacturing optimization strategies for 0.35-ｦﾌm design rules
Tyminski,J.K. ; McNamara,S.J. ; Sasaya,T. ; Komatsu,M. ; Humphrey,D.C. ; Winslow,A.
Pub. info.: Optical Microlithography X.  pp.391-404,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051