1.

Conference Proceedings
Conference Proceedings
1. Characterization of ArF immersion process for production (Invited Paper)
Kohler, C. ; de Boeij, W. ; van Ingen-Schenau, K. ; van de Kerkhof, M. ; de Klerk, J. ; Kok, H. ; Swinkels, G. ; Finders, J. ; Mulkens, J. ; Fiolka, D. ; Heil, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.13-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. New paradigm in lens metrology for lithographic scanner: evaluation and exploration
Lai, K. ; Gallatin, G.M. ; van de Kerkhof, M.A. ; Boeij, Wim de ; Kok, H. ; Schriever, M. ; Morillo, J.D. ; Fair, R.H. ; Bennett, S. ; Corliss, D.A.
Pub. info.: Optical Microlithography XVII.  pp.160-171,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. Full optical column characterization of DUV lithographic projection tools
van de Kerkhof, M.A. ; de Boeij, W. ; Kok, H. ; Silova, M. ; Baselmans, J. ; Hemerik, M.
Pub. info.: Optical Microlithography XVII.  pp.1960-1970,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377