1.

Conference Proceedings
Conference Proceedings
1. Characterization of ArF immersion process for production (Invited Paper)
Kohler, C. ; de Boeij, W. ; van Ingen-Schenau, K. ; van de Kerkhof, M. ; de Klerk, J. ; Kok, H. ; Swinkels, G. ; Finders, J. ; Mulkens, J. ; Fiolka, D. ; Heil, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.13-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Effect of Filament Bias on the Properties of Amorphous and Nanocrystalline Silicon From Hot-Wire Chemical Vapor Deposition
Wanka, H. N. ; Bruggemann, R. ; Kohler, C. ; Zrinscak, I. ; Schubert, M. B.
Pub. info.: Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A..  pp.915-,  1999.  Warrendale.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 507
3.

Conference Proceedings
Conference Proceedings
3. Contact hole litho correlation with shape analysis
Janssen, M. ; Elbattay, K. ; Kohler, C.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.169-178,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
4.

Conference Proceedings
Conference Proceedings
4. Optical characterization of liquid-crystal-on-silicon displays
Proll, K. -P. ; Kohler, C. ; Baumbach, T. ; Osten, W. ; Osten, S. ; Gruber, H. ; Langner, A. ; Wernicke, G.
Pub. info.: Optical Metrology in Production Engineering.  pp.632-642,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5457