1.

Conference Proceedings
Conference Proceedings
1. The Dry Cleaning Method to Remove Polymer Layer Deposited on Etching Chamber Wall
Seo, K.I. ; Shin, J.C. ; Kang, C.J ; Han, M.S. ; Mun, J.T. ; Koh, Y.B.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.586-594,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. Enhanced Pulsed Plasma Operation by Suppressing Side Band Modes
Chi, K.K. ; Hahm, J.H. ; Shin, K.S. ; Shin, H.S. ; Jung, C.O. ; Koh, Y.B. ; Lee, M.Y.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.96-105,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
3.

Conference Proceedings
Conference Proceedings
3. Study of the Boron-PhsosPhorous Doped and Undoped Silicatad Glass Etching in CHF3/Ar Plasma
Abatchav, M.K. ; Lee, C.K. ; Jung, C.O. ; Koh, Y.B. ; Lee, M.Y.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.522-530,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12