1.

Conference Proceedings

Conference Proceedings
Toenshoff, H.K. ; Ostendorf, A. ; Koerber, K. ; Baersch, N.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.531-536,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings

Conference Proceedings
Ostendorf, A. ; Koerber, K. ; Kulik, C. ; Otte, F.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.414-419,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
3.

Conference Proceedings

Conference Proceedings
Toenshoff, H.K. ; Koerber, K. ; Kulik, C. ; Schaefer, K.
Pub. info.: Photon Processing in Microelectronics and Photonics.  pp.519-527,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4637