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21 results

Conference Proceedings

1. Investigation of Copper Gettering Using Radio Isotope and Step-Etching Method in Hydrogen-Annealed and PBS,BSD Treated Silicon Wafers

Shimoi,N. ; Kobayashi,N. ; Muraoka,H.

Pub. info.:	Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.412-418, 1997. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3322

Conference Proceedings

2. High-resolution DUV inspection system for 150-nm generation masks

Tabata,M. ; Tsuchiya,H. ; Sanada,Y. ; Nishizaka,T. ; Hirazawa,H. ; Kobayashi,N. ; Nagai,H. ; Watanabe,T. ; Oohashi,K. ; Inoue,H. ; Nomura,T. ; Ono,A.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part1 pp.138-146, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

Conference Proceedings

3. Infrared camera and spectrograph for the Subaru Telescope

Tokunaga,A.T. ; Kobayashi,N. ; Bell,J. ; Ching,G.K. ; Hodapp,K. ; Hora,J.L. ; Neill,D. ; Onaka,P.M. ; Rayner,J.T. ; Robertson,L. ; Warren,D.W. ; Weber,M. ; Young,T.T.

Pub. info.:	Infrared astronomical instrumentation : 23-25 March 1998, Kona, Hawaii. Part 1 pp.512-524, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3354

Conference Proceedings

4. Precision slit design and fabrication for the Subaru IRCS instrument

Young,T.T. ; Tokunaga,A.T. ; Hora,J.L. ; Robertson,L. ; Kobayashi,N.

Pub. info.:	Infrared astronomical instrumentation : 23-25 March 1998, Kona, Hawaii. Part 1 pp.317-321, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3354

Conference Proceedings

5. 1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization

Fiebig,M. ; Stamm,U. ; Oesterlin,P. ; Kobayashi,N. ; Fechner,B.

Pub. info.:	Flat panel display technology and display metrology II : 22-23 January 2001, San Jose, [California] USA. pp.38-40, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4295

Conference Proceedings

6. Infrared instrumentation for the Subaru Telescope

Nishimura,T. ; Hayashi,S. ; Kaifu,N. ; Kobayashi,N. ; Kobayashi,Y. ; Tamura,M. ; Takami,H. ; Takata,T. ; Yamashita,T. ; Kataza,H. ; tanabe,T. ; Ito,Y. ; Miyata,T. ; Mori,A. ; Tomono,D. ; Murakawa,K. ; Shibai,H. ; Nagata,T. ; Iwamuro,F.

Pub. info.:	Optical telescopes of today and tomorrow : following in the direction of Tycho Brahe : 29 May-2 June, 1996, Landskrona/Hven, Sweden. pp.1064-1069, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2871

Conference Proceedings

7. X-ray pulse-shape analysis on bridge-type microcalorimeters with Ti-Au transition-edge sensors

Ukibe,M. ; Tanaka,K. ; Hirayama,F. ; Mizuki,T. ; Hikosaka,T. ; Morooka,T. ; Chinone,K. ; Kawabe,U. ; Nemoto,T. ; Koyanagi,M. ; Ohkubo,M. ; Kobayashi,N.

Pub. info.:	X-ray, and gamma-ray instrumentation for astronomy XI : 2-4 August 2000 San Diego, USA. pp.376-383, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4140

Conference Proceedings

8. Studies directed to the design and development of a high-energy implant resist

Montgomery,W. ; Xu,P. ; Lu,P.-H. ; Methsun,S. ; Dammel,R.R. ; Meyyappan,N. ; Kobayashi,N. ; pritchard,D.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part1 pp.531-544, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

9. IRCS:infrared camera and spectrograph for the Subaru Telescope

Kobayashi,N. ; Tokunaga,A.T. ; Terada,H. ; Goto,M. ; Weber,M. ; Potter,R. ; Onaka,P.M. ; Ching,G.K. ; Young,T.T. ; Fletcher,K. ; Neil,D. ; Robertson,L. ; Cook,D. ; Imanishi,M.

Pub. info.:	Optical and IR telescope instrumentation and detectors : 27-31 March 2000, Munich, Germany. Part2 pp.1056-1066, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4008

10.

Conference Proceedings

10. The Characterization of SiC Hot-Implanted with Ga+

Tanaka,Y. ; Kobayashi,N. ; Hasegawa,M. ; Yoshida,S. ; Ishida,Y. ; Nishijima,T. ; Hayashi,N.

Pub. info.:	Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997. Part2 pp.713-716, 1998. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	264-268

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