1.
Conference Proceedings
Kolesar,E.S. ; Ruff,M.D. ; Ko,S.Y. ; Wilks,R.J. ; Howard,J.T. ; Allen,P.B. ; Wilken,J.M. ; Bosch,J.E.
Pub. info.:
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK . pp.310-321, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4407
2.
Conference Proceedings
Kolesar,E.S. ; Allen,P.B. ; Boydston,N.C. ; Howard,J.T. ; Ko,S.Y. ; Wilken,J.M.
Pub. info.:
Miniaturized Systems with Micro-Optics and MEMS . pp.365-374, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3878
3.
Conference Proceedings
Allen,P.B. ; Boydston,N.C. ; Howard,J.T. ; Ko,S.Y. ; Kolesar,E.S. ; Ruff,M.D. ; Wilken,J.M. ; Wilks,R.J.
Pub. info.:
Micromachined Devices and Components VI . pp.148-158, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176