1.

Conference Proceedings
Conference Proceedings
1. Response Surface technique foe Ex Situ Process Uniformity Optimization in a Multi-Zone RTP System
Knutson, Karson L. ; Cooper, Thomas L.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.31-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
2.

Conference Proceedings
Conference Proceedings
2. Monte Carlo Simulation of Optical Temperature Sensors in RTP Systems
Cole, J. Vernon ; Knutson, Karson L. ; Fiory, Anthony T. ; Jensen, Klavs F.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.143-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387