1.

Conference Proceedings
Conference Proceedings
1. Stress Generation in PECVD silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.97-102,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
2.

Conference Proceedings
Conference Proceedings
2. Semiconductor Analysis And the 21st Century Fab
Dziobkowski, C. ; Bruley, J. ; Coffin, J. ; Falcon, D. ; Flaitz, P. ; Klymko, N. ; McMurray, J. ; Ronsheim, P. ; Wildman, H. ; Zaitz, M.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.580-592,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
3.

Conference Proceedings
Conference Proceedings
3. Stress Generation in PECVD Silicon Nitride Thin Films for Microelectronics Applications
Belyansky, M. ; Klymko, N. ; Madan, A. ; Mallikarjunan, A. ; Li, Y. ; Chakravarti, A. ; Deshpande, S. ; Domenicucci, A. ; Bedell, S. ; Adams, E. ; Coffin, J. ; Tai, L. ; Sun, S-P. ; Widodo, J. ; Lai, C-W.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.325-332,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875
4.

Conference Proceedings
Conference Proceedings
4. Strained Si-on-Insulator Fabricated From Elastically-Relaxed Si/SiGe Structures
Mooney, P.M. ; Cohen, G.M. ; Chen, H. ; Chu, J.O. ; Klymko, N.
Pub. info.: High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.27-32,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 809